Tunable low-loss silicon nitride integrated circuits

A. S. Baburin, E. S. Lotkov, E. V. Sergeev, M. Andronic, D. A. Baklykov, V. E. Stukalova, K. A. Buzaverov, S. S. Avdeev, I. A. Ryzhikov, I. V. Dyakonov, N. Skryabin, M. Yu. Saygin, S. P. Kulik, I. A. Rodionov

2022 International Conference Laser Optics (ICLO) (2022)

Аннотация
We present tunable photonic integrated circuits platform with low losses in a wide wavelength bandwidth from 900 to 1550 nm based on Si₃ N₄ waveguides.
DOI
https://doi.org/10.1109/ICLO54117.2022.9839948